WebIt was found that all synthesized films were amorphous and represented a mixture of SiCxNy with free carbon. The films' surfaces were smooth and uniform, with a roughness of about … WebThe magnetic SiCxNy:Fe films with tunable resistance and magnetization was studied. • Variation of Fe doping leads to change the conductance by more than 8 orders of value. • …
Near-Room-Temperature Soft Plasma Pulsed Deposition of …
WebIt was found that the best periodic structures and greatest content of SiCxNy nanoparticles occur in the case in which the sublayer thickness of SiCxNy and AlN are 42 and 3 nm, respectively. In this case, the NPSLs exhibit strong photoluminescence (PL) either before or after annealing. WebApr 19, 2024 · GRAPHICAL ABSTRACT ABSTRACT Two aminosilanes derived from hexamethyldisilazane as chemical vapor deposition (CVD) precursors for SiCxNy and relevant films have been reported and characterized by 1H, 13C, and 29Si NMR as well as by EI-MS and elemental analysis, where necessary. Thermal stability, transport behavior and … how to study people\u0027s behavior
IR-study of a-SiCx:H and a-SiCxNy:H films for c-Si surface …
WebIt was found that the best periodic structures and greatest content of SiCxNy nanoparticles occur in the case in which the sublayer thickness of SiCxNy and AlN are 42 and 3 nm, … WebMar 2, 2012 · Low-k silicon carbonitride (SiC x N y) films with k of 3.6–4.6 were prepared by radio frequency plasma-enhanced chemical vapor deposition at 25 to 400°C under low power density of 0.15 W/cm 3, using a single source precursor, 1, 3, 5-trimethyl-1, 3, 5-trivinylcyclotrisilazane (VSZ), and Ar.At lower deposition temperatures (≤ 200°C), most … WebLow-k silicon carbonitride (SiC x N y) films with k of 3.6–4.6 were prepared by radio frequency plasma-enhanced chemical vapor deposition at 25 to 400°C under low power … how to study openings in chess